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Mechanical-Thermal Noise in Drive-Mode of a Silicon Micro-Gyroscope
A new closed-loop drive scheme which decouples the phase and the gain of the closed-loop driving system was designed in a Silicon Micro-Gyroscope (SMG). We deduce the system model of closed-loop driving and use stochastic averaging to obtain an approximate “slow” system that clarifies the effect of...
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| Autori principali: | , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Molecular Diversity Preservation International (MDPI)
2009
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3297147/ https://ncbi.nlm.nih.gov/pubmed/22412316 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s90503357 |
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