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Design and Application of Quadrature Compensation Patterns in Bulk Silicon Micro-Gyroscopes
This paper focuses on the detailed design issues of a peculiar quadrature reduction method named system stiffness matrix diagonalization, whose key technology is the design and application of quadrature compensation patterns. For bulk silicon micro-gyroscopes, a complete design and application case...
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| Publicado en: | Sensors (Basel) |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2014
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4279491/ https://ncbi.nlm.nih.gov/pubmed/25356646 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s141120419 |
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