Level Set Approach to Anisotropic Wet Etching of Silicon

Lignende værker

• Effect of Isopropyl Alcohol Concentration and Etching Time on Wet Chemical Anisotropic Etching of Low-Resistivity Crystalline Silicon Wafer
  af: Abdur-Rahman, Eyad, et al.
  Udgivet: (2017)
• Evolution of Si Crystallographic Planes-Etching of Square and Circle Patterns in 25 wt % TMAH
  af: Smiljanić, Milče M., et al.
  Udgivet: (2019)
• Evolution of Si Crystallographic Planes-Etching of Square and Circle Patterns in 25 wt % TMAH
  af: Milče M. Smiljanić, et al.
  Udgivet: (2019-01-01)
• Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching
  af: Kapil Debnath, et al.
  Udgivet: (2016-11-01)
• Etching of Uncompensated Convex Corners with Sides along <n10> and <100> in 25 wt% TMAH at 80 °C
  af: Smiljanić, Milče M., et al.
  Udgivet: (2020)