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An Effective Lift-Off Method for Patterning High-Density Gold Interconnects on an Elastomeric Substrate
High-resolution, high-density gold interconnects are effectively patterned on an elastomeric substrate. A 3cm cable of ten gold wires with 10μm width and 20μm pitch is achieved, successfully demonstrating density increases of more than one order of magnitude from previously established work. Many ap...
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| Main Authors: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2010
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3272486/ https://ncbi.nlm.nih.gov/pubmed/21104803 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1002/smll.201001456 |
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