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Effective surface oxidation of polymer replica molds for nanoimprint lithography
In nanoimprint lithography, a surface oxidation process is needed to produce an effective poly(dimethylsiloxane) coating that can be used as an anti-adhesive surface of template molds. However, the conventional photooxidation technique or acidic oxidative treatment cannot be easily applied to polyme...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3268084/ https://ncbi.nlm.nih.gov/pubmed/22221587 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-39 |
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