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An Integrated ISFET Sensor Array

A monolithically integrated ISFET sensor array and interface circuit are described. A new high-density, low-power source-drain follower was developed for the sensor array. ISFETs were formed by depositing Au/Ti extended-gate electrodes on standard MOSFETs, then thin silicon nitride layers using cata...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Nakazato, Kazuo
Format: Artigo
Sprache:Inglês
Veröffentlicht: Molecular Diversity Preservation International (MDPI) 2009
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3260616/
https://ncbi.nlm.nih.gov/pubmed/22291539
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s91108831
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