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On the Use of Scalable NanoISFET Arrays of Silicon with Highly Reproducible Sensor Performance for Biosensor Applications
[Image: see text] As a prerequisite to the development of real label-free bioassay applications, a high-throughput top–down nanofabrication process is carried out with a combination of nanoimprint lithography, anisotropic wet-etching, and photolithography methods realizing nanoISFET arrays that are...
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| Pubblicato in: | ACS Omega |
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| Autori principali: | , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
American Chemical Society
2016
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| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6044623/ https://ncbi.nlm.nih.gov/pubmed/30023473 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsomega.6b00014 |
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