On the Use of Scalable NanoISFET Arrays of Silicon with Highly Reproducible Sensor Performance for Biosensor Applications

[Image: see text] As a prerequisite to the development of real label-free bioassay applications, a high-throughput top–down nanofabrication process is carried out with a combination of nanoimprint lithography, anisotropic wet-etching, and photolithography methods realizing nanoISFET arrays that are...

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Gepubliceerd in:ACS Omega
Hoofdauteurs: Rani, Dipti, Pachauri, Vivek, Mueller, Achim, Vu, Xuan Thang, Nguyen, Thanh Chien, Ingebrandt, Sven
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: American Chemical Society 2016
Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC6044623/
https://ncbi.nlm.nih.gov/pubmed/30023473
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsomega.6b00014
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