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A Novel Self-aligned and Maskless Process for Formation of Highly Uniform Arrays of Nanoholes and Nanopillars

Fabrication of a large area of periodic structures with deep sub-wavelength features is required in many applications such as solar cells, photonic crystals, and artificial kidneys. We present a low-cost and high-throughput process for realization of 2D arrays of deep sub-wavelength features using a...

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Auteurs principaux: Wu, Wei, Dey, Dibyendu, Memis, Omer G, Katsnelson, Alex, Mohseni, Hooman
Format: Artigo
Langue:Inglês
Publié: Springer 2008
Sujets:
Accès en ligne:https://ncbi.nlm.nih.gov/pmc/articles/PMC3244793/
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s11671-008-9124-6
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