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Characterization of Thick and Thin Film SiCN for Pressure Sensing at High Temperatures

Pressure measurement in high temperature environments is important in many applications to provide valuable information for performance studies. Information on pressure patterns is highly desirable for improving performance, condition monitoring and accurate prediction of the remaining life of syste...

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書誌詳細
主要な著者: Leo, Alfin, Andronenko, Sergey, Stiharu, Ion, Bhat, Rama B.
フォーマット: Artigo
言語:Inglês
出版事項: Molecular Diversity Preservation International (MDPI) 2010
主題:
オンライン・アクセス:https://ncbi.nlm.nih.gov/pmc/articles/PMC3244017/
https://ncbi.nlm.nih.gov/pubmed/22205871
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s100201338
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