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Characterization of Thick and Thin Film SiCN for Pressure Sensing at High Temperatures

Pressure measurement in high temperature environments is important in many applications to provide valuable information for performance studies. Information on pressure patterns is highly desirable for improving performance, condition monitoring and accurate prediction of the remaining life of syste...

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Bibliografski detalji
Glavni autori: Leo, Alfin, Andronenko, Sergey, Stiharu, Ion, Bhat, Rama B.
Format: Artigo
Jezik:Inglês
Izdano: Molecular Diversity Preservation International (MDPI) 2010
Teme:
Online pristup:https://ncbi.nlm.nih.gov/pmc/articles/PMC3244017/
https://ncbi.nlm.nih.gov/pubmed/22205871
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s100201338
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