Maskless Plasmonic Lithography at 22 nm Resolution

Optical imaging and photolithography promise broad applications in nano-electronics, metrologies, and single-molecule biology. Light diffraction however sets a fundamental limit on optical resolution, and it poses a critical challenge to the down-scaling of nano-scale manufacturing. Surface plasmons...

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Autori principali: Pan, Liang, Park, Yongshik, Xiong, Yi, Ulin-Avila, Erick, Wang, Yuan, Zeng, Li, Xiong, Shaomin, Rho, Junsuk, Sun, Cheng, Bogy, David B., Zhang, Xiang
Natura: Artigo
Lingua:Inglês
Pubblicazione: Nature Publishing Group 2011
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Article
Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC3240963/
https://ncbi.nlm.nih.gov/pubmed/22355690
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep00175
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