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Optimal and Robust Design Method for Two-Chip Out-of-Plane Microaccelerometers
In this paper, an optimal and robust design method to implement a two-chip out-of-plane microaccelerometer system is presented. The two-chip microsystem consists of a MEMS chip for sensing the external acceleration and a CMOS chip for signal processing. An optimized design method to determine the de...
Αποθηκεύτηκε σε:
| Κύριοι συγγραφείς: | , , , |
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| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
Molecular Diversity Preservation International (MDPI)
2010
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| Θέματα: | |
| Διαθέσιμο Online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3231064/ https://ncbi.nlm.nih.gov/pubmed/22163484 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s101210524 |
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