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An Analytical Model of Joule Heating in Piezoresistive Microcantilevers
The present study investigates Joule heating in piezoresistive microcantilever sensors. Joule heating and thermal deflections are a major source of noise in such sensors. This work uses analytical and numerical techniques to characterise the Joule heating in 4-layer piezoresistive microcantilevers m...
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| Main Authors: | , |
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| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
Molecular Diversity Preservation International (MDPI)
2010
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| Teme: | |
| Online dostop: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3231039/ https://ncbi.nlm.nih.gov/pubmed/22163433 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s101109668 |
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