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High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors
This study proposes new microcantilever designs in slotted step configuration to improve the S/N ratio of surface stress-based sensors used in physical, chemical, biochemical and biosensor applications. The cantilevers are made of silicon dioxide with a u-shaped silicon piezoresistor in p-doped. The...
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| Main Authors: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Molecular Diversity Preservation International (MDPI)
2013
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3673072/ https://ncbi.nlm.nih.gov/pubmed/23535637 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s130404088 |
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