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Simultaneous fabrication of line defects-embedded periodic lattice by topographically assisted holographic lithography
We have demonstrated simultaneous fabrication of designed defects within a periodic structure. For rapid fabrication of periodic structures incorporating nanoscale line-defects at large area, topographically assisted holographic lithography (TAHL) technique, combining the strength of hologram lithog...
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| Main Authors: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2011
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3211868/ https://ncbi.nlm.nih.gov/pubmed/21749704 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-6-449 |
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