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Study of the formation processes of gold droplet arrays on Si substrates by high temperature anneals

In this study, the peculiarities of the transformations of gold films deposited on the Si wafer surfaces as a result of high temperature anneals are investigated experimentally depending on the conditions of wafer surface preparation and the annealing regimes. The morphology and the distribution fun...

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Main Authors: Klimovskaya, Alla, Sarikov, Andrey, Pedchenko, Yury, Voroshchenko, Andrey, Lytvyn, Oksana, Stadnik, Alexandr
Formato: Artigo
Idioma:Inglês
Publicado: Springer 2011
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Acceso en liña:https://ncbi.nlm.nih.gov/pmc/articles/PMC3211202/
https://ncbi.nlm.nih.gov/pubmed/21711668
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-6-151
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