Insight into unusual impurity absorbability of GeO(2) in GeO(2)∕Ge stacks

Adsorbed species and its diffusion behaviors in GeO(2)∕Ge stacks, which are future alternative metal-oxide-semiconductor (MOS) materials, have been investigated using various physical analyses. We clarified that GeO(2) rapidly absorbs moisture in air just after its exposure. After the absorbed moist...

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Bibliografiske detaljer
Main Authors: Ogawa, Shingo, Suda, Taichi, Yamamoto, Takashi, Kutsuki, Katsuhiro, Hideshima, Iori, Hosoi, Takuji, Shimura, Takayoshi, Watanabe, Heiji
Format: Artigo
Sprog:Inglês
Udgivet: American Institute of Physics 2011
Fag:
Electronic Transport and Semiconductors
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3206894/
https://ncbi.nlm.nih.gov/pubmed/22053111
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3644393
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