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Insight into unusual impurity absorbability of GeO(2) in GeO(2)∕Ge stacks
Adsorbed species and its diffusion behaviors in GeO(2)∕Ge stacks, which are future alternative metal-oxide-semiconductor (MOS) materials, have been investigated using various physical analyses. We clarified that GeO(2) rapidly absorbs moisture in air just after its exposure. After the absorbed moist...
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| Main Authors: | , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
American Institute of Physics
2011
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3206894/ https://ncbi.nlm.nih.gov/pubmed/22053111 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3644393 |
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