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The Fabrication of Sub-5-nm Nanochannels in Insulating Substrates using Focused Ion Beam Milling
The use of focused ion beam (FIB) milling to fabricate nanochannels with critical dimensions extending below 5 nm is described. FIB milled lines have narrowing widths as they are milled deeper into a substrate. This focusing characteristic is coupled with a two-layered architecture consisting of a r...
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| Huvudupphovsmän: | , |
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| Materialtyp: | Artigo |
| Språk: | Inglês |
| Publicerad: |
2010
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| Ämnen: | |
| Länkar: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3125600/ https://ncbi.nlm.nih.gov/pubmed/21171628 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/nl103369g |
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