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Hollow waveguides with low intrinsic photoluminescence fabricated with Ta(2)O(5) and SiO(2) films
A type of integrated hollow core waveguide with low intrinsic photoluminescence fabricated with Ta(2)O(5) and SiO(2) films is demonstrated. Hollow core waveguides made with a combination of plasma-enhanced chemical vapor deposition SiO(2) and sputtered Ta(2)O(5) provide a nearly optimal structure fo...
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| Hauptverfasser: | , , , , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
American Institute of Physics
2011
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3064680/ https://ncbi.nlm.nih.gov/pubmed/21448254 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3561749 |
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