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Micropore and nanopore fabrication in hollow antiresonant reflecting optical waveguides
We demonstrate the fabrication of micropore and nanopore features in hollow antiresonant reflecting optical waveguides to create an electrical and optical analysis platform that can size select and detect a single nanoparticle. Micropores (4 μm diameter) are reactive-ion etched through the top SiO(2...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2010
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3171701/ https://ncbi.nlm.nih.gov/pubmed/21922035 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/1.3378152 |
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