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Micropore and nanopore fabrication in hollow antiresonant reflecting optical waveguides

We demonstrate the fabrication of micropore and nanopore features in hollow antiresonant reflecting optical waveguides to create an electrical and optical analysis platform that can size select and detect a single nanoparticle. Micropores (4 μm diameter) are reactive-ion etched through the top SiO(2...

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Detaylı Bibliyografya
Asıl Yazarlar: Holmes, Matthew R., Shang, Tao, Hawkins, Aaron R., Rudenko, Mikhail, Measor, Philip, Schmidt, Holger
Materyal Türü: Artigo
Dil:Inglês
Baskı/Yayın Bilgisi: 2010
Konular:
Online Erişim:https://ncbi.nlm.nih.gov/pmc/articles/PMC3171701/
https://ncbi.nlm.nih.gov/pubmed/21922035
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/1.3378152
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