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Micropore and nanopore fabrication in hollow antiresonant reflecting optical waveguides

We demonstrate the fabrication of micropore and nanopore features in hollow antiresonant reflecting optical waveguides to create an electrical and optical analysis platform that can size select and detect a single nanoparticle. Micropores (4 μm diameter) are reactive-ion etched through the top SiO(2...

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Main Authors: Holmes, Matthew R., Shang, Tao, Hawkins, Aaron R., Rudenko, Mikhail, Measor, Philip, Schmidt, Holger
Format: Artigo
Jezik:Inglês
Izdano: 2010
Teme:
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC3171701/
https://ncbi.nlm.nih.gov/pubmed/21922035
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/1.3378152
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