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Micropore and nanopore fabrication in hollow antiresonant reflecting optical waveguides

We demonstrate the fabrication of micropore and nanopore features in hollow antiresonant reflecting optical waveguides to create an electrical and optical analysis platform that can size select and detect a single nanoparticle. Micropores (4 μm diameter) are reactive-ion etched through the top SiO(2...

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Autori principali: Holmes, Matthew R., Shang, Tao, Hawkins, Aaron R., Rudenko, Mikhail, Measor, Philip, Schmidt, Holger
Natura: Artigo
Lingua:Inglês
Pubblicazione: 2010
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Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC3171701/
https://ncbi.nlm.nih.gov/pubmed/21922035
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/1.3378152
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