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Nanopore sculpting with noble gas ions
We demonstrate that 3 keV ion beams, formed from the common noble gasses, He, Ne, Ar, Kr, and Xe, can controllably “sculpt” nanometer scale pores in silicon nitride films. Single nanometer control of structural dimensions in nanopores can be achieved with all ion species despite a very wide range of...
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| 主要な著者: | , , , , |
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| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
2006
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3039599/ https://ncbi.nlm.nih.gov/pubmed/21331305 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.2216880 |
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