A Parylene Bellows Electrochemical Actuator

We present the first electrochemical actuator with Parylene bellows for large-deflection operation. The bellows diaphragm was fabricated using a polyethylene-glycol-based sacrificial molding technique followed by coating in Parylene C. Bellows were mechanically characterized and integrated with a pa...

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Bibliografiske detaljer
Main Authors: Li, Po-Ying, Sheybani, Roya, Gutierrez, Christian A., Kuo, Jonathan T. W., Meng, Ellis
Format: Artigo
Sprog:Inglês
Udgivet: 2010
Fag:
Article
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3035913/
https://ncbi.nlm.nih.gov/pubmed/21318081
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