A carregar...
Rolled-Up Nanotech: Illumination-Controlled Hydrofluoric Acid Etching of AlAs Sacrificial Layers
The effect of illumination on the hydrofluoric acid etching of AlAs sacrificial layers with systematically varied thicknesses in order to release and roll up InGaAs/GaAs bilayers was studied. For thicknesses of AlAs below 10 nm, there were two etching regimes for the area under illumination: one at...
Na minha lista:
| Main Authors: | , , , |
|---|---|
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2009
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2893847/ https://ncbi.nlm.nih.gov/pubmed/20652125 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s11671-009-9421-8 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|