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Self-assembly from milli- to nanoscales: methods and applications
The design and fabrication techniques for microelectromechanical systems (MEMS) and nanodevices are progressing rapidly. However, due to material and process flow incompatibilities in the fabrication of sensors, actuators and electronic circuitry, a final packaging step is often necessary to integra...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
2009
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2832205/ https://ncbi.nlm.nih.gov/pubmed/20209016 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/19/8/083001 |
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