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Self-assembly from milli- to nanoscales: methods and applications

The design and fabrication techniques for microelectromechanical systems (MEMS) and nanodevices are progressing rapidly. However, due to material and process flow incompatibilities in the fabrication of sensors, actuators and electronic circuitry, a final packaging step is often necessary to integra...

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Detalhes bibliográficos
Main Authors: Mastrangeli, M, Abbasi, S, Varel, C, Van Hoof, C, Celis, J-P, Böhringer, K F
Formato: Artigo
Idioma:Inglês
Publicado em: 2009
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC2832205/
https://ncbi.nlm.nih.gov/pubmed/20209016
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/19/8/083001
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