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SU-8 force sensing pillar arrays for biological measurements
The generation and sensation of mechanical force plays a role in many dynamic biological processes, including touch sensation. This paper presents a two-axis micro strain gauge force sensor constructed from multiple layers of SU-8 and metal on quartz substrates. The sensor was designed to meet requi...
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| Main Authors: | , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2009
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2818990/ https://ncbi.nlm.nih.gov/pubmed/19417913 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1039/b818622g |
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