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Modeling and Characterization of Electrostatic Comb-drive Actuators in Conducting Liquid Media
Operation of electrostatic actuators in liquid media has various proposed applications, especially in biological environments. The devices are operated by modulating at a frequency higher than the relaxation rate of the ions in solution. We present circuit models based on electric double layer theor...
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| Hauptverfasser: | , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
2009
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2762223/ https://ncbi.nlm.nih.gov/pubmed/20160927 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/19/6/065008 |
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