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Flexible Chip Scale Package and Interconnect for Implantable MEMS Movable Microelectrodes for the Brain
We report here a novel approach called MEMS microflex interconnect (MMFI) technology for packaging a new generation of Bio-MEMS devices that involve movable microelectrodes implanted in brain tissue. MMFI addresses the need for (i) operating space for movable parts and (ii) flexible interconnects fo...
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
2009
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2761039/ https://ncbi.nlm.nih.gov/pubmed/20160981 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JMEMS.2009.2013391 |
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