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Plasma fluorination of diamond-like carbon surfaces: Mechanism and application to nanoimprint lithography
Diamond-like carbon (DLC) films, used as molds for nanoimprint lithography, were treated with a fluorocarbon-based plasma in order to enhance their anti-adhesion properties. While elllipsometry and AFM measurements showed negligible changes in thickness and surface roughness after plasma processing,...
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| Autori principali: | , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
2009
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2749521/ https://ncbi.nlm.nih.gov/pubmed/19420525 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0957-4484/20/14/145306 |
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