Carregant...
Plasma fluorination of diamond-like carbon surfaces: Mechanism and application to nanoimprint lithography
Diamond-like carbon (DLC) films, used as molds for nanoimprint lithography, were treated with a fluorocarbon-based plasma in order to enhance their anti-adhesion properties. While elllipsometry and AFM measurements showed negligible changes in thickness and surface roughness after plasma processing,...
Guardat en:
| Autors principals: | , |
|---|---|
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
2009
|
| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2749521/ https://ncbi.nlm.nih.gov/pubmed/19420525 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0957-4484/20/14/145306 |
| Etiquetes: |
Afegir etiqueta
Sense etiquetes, Sigues el primer a etiquetar aquest registre!
|