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A Photoresist with Low Fluorescence for Bioanalytical Applications
The negative photoresist SU-8 has found widespread use as a material in the fabrication of microelectrical-mechanical systems (MEMS). While SU-8 has been utilized as a structural material for biological MEMS, a number of SU-8 properties limit its application in these bioanalytical devices. These att...
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| Main Authors: | , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
2007
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2435225/ https://ncbi.nlm.nih.gov/pubmed/17949059 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/ac071528q |
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