A Photoresist with Low Fluorescence for Bioanalytical Applications

The negative photoresist SU-8 has found widespread use as a material in the fabrication of microelectrical-mechanical systems (MEMS). While SU-8 has been utilized as a structural material for biological MEMS, a number of SU-8 properties limit its application in these bioanalytical devices. These att...

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Bibliografiske detaljer
Main Authors: Pai, Jeng-Hao, Wang, Yuli, Salazar, Gina To'A, Sims, Christopher E., Bachman, Mark, Li, G.P., Allbritton, Nancy L.
Format: Artigo
Sprog:Inglês
Udgivet: 2007
Fag:
Article
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC2435225/
https://ncbi.nlm.nih.gov/pubmed/17949059
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/ac071528q
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