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Characterization of a-SiC(x):H thin films as an encapsulation material for integrated silicon based neural interface devices
A fully integrated, wireless neural interface device is being developed to free patients from the restriction and risk of infection associated with a transcutaneous wired connection. This device requires a hermetic, biocompatible encapsulation layer at the interface between the device and the neural...
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| Auteurs principaux: | , , , , |
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| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
2007
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2330333/ https://ncbi.nlm.nih.gov/pubmed/18437249 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.tsf.2007.04.050 |
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