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PHOTOLITHOGRAPHY OF FILM STRUCTURES XEROGEL/POROUS ANODIC ALUMINA PREPARED IN VARIOUS ELECTROLYTES
The results of study the morphology of the microstructured porous anodic alumina films formed using electrochemical anodization, sol-gel synthesis, photolithography and chemical etching are given. The metal mask was not used in photolithography, because of fabrication the continuous xerogel film. Th...
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| Hauptverfasser: | , , , , , , |
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| Format: | Artigo |
| Sprache: | Russo |
| Veröffentlicht: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Schriftenreihe: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
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| Online Zugang: | https://doklady.bsuir.by/jour/article/view/314 |
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