PHOTOLITHOGRAPHY OF FILM STRUCTURES XEROGEL/POROUS ANODIC ALUMINA PREPARED IN VARIOUS ELECTROLYTES

The results of study the morphology of the microstructured porous anodic alumina films formed using electrochemical anodization, sol-gel synthesis, photolithography and chemical etching are given. The metal mask was not used in photolithography, because of fabrication the continuous xerogel film. Th...

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Bibliografiska uppgifter
Huvudupphovsmän: L. S. Khoroshko, A. M. Asharif, T. I. Orekhovskaya, M. V. Meledina, V. A. Sokol, B. S. Kolosnitsin, N. V. Gaponenko
Materialtyp: Artigo
Språk:Russo
Publicerad: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-06-01
Serie:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Ämnen:
пористый анодный оксид алюминия
золь-гель
фотолитография
Länkar:https://doklady.bsuir.by/jour/article/view/314
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