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Displacement measurement of the compliant positioning stage based on a computer micro-vision method
We propose a practical computer micro-vision-based method for displacement measurements of the compliant positioning stage. The algorithm of the proposed method is based on a template matching approach composed of an integer-pixel search and a sub-pixel search. By combining with an optical microscop...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
AIP Publishing LLC
2016-02-01
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| Colecção: | AIP Advances |
| Acesso em linha: | http://dx.doi.org/10.1063/1.4941935 |
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