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Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope
A novel design of piezoelectric aluminum nitride (AlN)-Si composite cantilever gyroscope is proposed in this paper. The cantilever is stimulated to oscillate in plane by two inverse voltages which are applied on the two paralleled drive electrodes, respectively. The whole working principles are dedu...
में बचाया:
| मुख्य लेखकों: | , , , , , , |
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| स्वरूप: | Artigo |
| भाषा: | Inglês |
| प्रकाशित: |
MDPI AG
2018-02-01
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| श्रृंखला: | Micromachines |
| विषय: | |
| ऑनलाइन पहुंच: | http://www.mdpi.com/2072-666X/9/2/81 |
| टैग : |
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