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Sputter-Deposited Indium–Tin Oxide Thin Films for Acetaldehyde Gas Sensing
Reactive dual-target DC magnetron sputtering was used to prepare In–Sn oxide thin films with a wide range of compositions. The films were subjected to annealing post-treatment at 400 °C or 500 °C for different periods of time. Compositional and structural characterizations were performed by X-ray ph...
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| Main Authors: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2016-04-01
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| Colecção: | Coatings |
| Assuntos: | |
| Acesso em linha: | http://www.mdpi.com/2079-6412/6/2/19 |
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