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Investigation of machining mechanism of monocrystalline silicon in nanometric grinding
Monocrystalline silicon is the foundation of the computer industry, so it has a great significance to study the ultra-high precision machining of silicon. Molecular dynamics has been proved as a very effective method for the study of ultra-precision machining in nanoscale. During the grinding of bri...
Wedi'i Gadw mewn:
| Prif Awduron: | , , , |
|---|---|
| Fformat: | Artigo |
| Iaith: | Inglês |
| Cyhoeddwyd: |
AIP Publishing LLC
2017-05-01
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| Cyfres: | AIP Advances |
| Mynediad Ar-lein: | http://dx.doi.org/10.1063/1.4983216 |
| Tagiau: |
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