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Glass Polarization Induced Drift of a Closed-Loop Micro-Accelerometer
The glass polarization effects were introduced in this paper to study the main cause of turn-on drift phenomenon of closed-loop micro-accelerometers. The glass substrate underneath the sensitive silicon structure underwent a polarizing process when the DC bias voltage was applied. The slow polarizin...
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| Main Authors: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI AG
2018-01-01
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| Series: | Materials |
| Assuntos: | |
| Acceso en liña: | http://www.mdpi.com/1996-1944/11/1/163 |
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