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Glass Polarization Induced Drift of a Closed-Loop Micro-Accelerometer
The glass polarization effects were introduced in this paper to study the main cause of turn-on drift phenomenon of closed-loop micro-accelerometers. The glass substrate underneath the sensitive silicon structure underwent a polarizing process when the DC bias voltage was applied. The slow polarizin...
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| Main Authors: | , , , , |
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| Formáid: | Artigo |
| Teanga: | Inglês |
| Foilsithe: |
MDPI AG
2018-01-01
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| Sraith: | Materials |
| Ábhair: | |
| Rochtain Ar Líne: | http://www.mdpi.com/1996-1944/11/1/163 |
| Clibeanna: |
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