A Study on Increasing Sensitivity of Rectangular Microcantilevers Used in Biosensors

This study proposes a new microcantilever design with a rectangular hole at the fixed end of the cantilever that is more sensitive than conventional ones. A commercial finite element analysis software ANSYS is used to analyze it. The Stoney equation is first used to calculate the surface stress indu...

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Detalles Bibliográficos
Main Authors: Chongdu Cho, Mohd. Zahid Ansari
Formato: Artigo
Idioma:Inglês
Publicado: MDPI AG 2008-11-01
Series:Sensors
Assuntos:
Surface stress
Biosensor
Microcantilever
Stoney equation
Sader equation
Acceso en liña:http://www.mdpi.com/1424-8220/8/11/7530/
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