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A Study on Increasing Sensitivity of Rectangular Microcantilevers Used in Biosensors

This study proposes a new microcantilever design with a rectangular hole at the fixed end of the cantilever that is more sensitive than conventional ones. A commercial finite element analysis software ANSYS is used to analyze it. The Stoney equation is first used to calculate the surface stress indu...

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Bibliografiske detaljer
Main Authors: Chongdu Cho, Mohd. Zahid Ansari
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2008-11-01
Serier:Sensors
Fag:
Online adgang:http://www.mdpi.com/1424-8220/8/11/7530/
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