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A Methodology for an FPGA Implementation of a Programmable Logic Controller to Control an Atomic Layer Deposition System
In this work, we present an industrial cold walled Atomic Layer Deposition (ALD) system, which can be controlled by either a traditional programmable logic controller (PLC) system or a field-programmable gate array (FPGA) prototyping board. This work presents an FPGA controlled system that takes lad...
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| Main Authors: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Hindawi Limited
2022-01-01
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| Colecção: | International Journal of Reconfigurable Computing |
| Acesso em linha: | http://dx.doi.org/10.1155/2022/8827417 |
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