Surface Texture Evolution of Fused Silica in a Combined Process of Atmospheric Pressure Plasma Processing and Bonnet Polishing

The increasing demand for precision optical components invokes the requirement of advanced fabrication techniques with high efficiency. Atmospheric pressure plasma processing (APPP), based on chemical etching, has a high material removal rate and a Gaussian-shaped influence function, which is suitab...

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Main Authors: Xing Su, Chenglong Ji, Yang Xu, Duo Li, David Walker, Guoyu Yu, Hongyu Li, Bo Wang
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI AG 2019-10-01
Colecção:Coatings
Assuntos:
optical surface
atmospheric pressure plasma processing
bonnet polishing
surface texture
Acesso em linha:https://www.mdpi.com/2079-6412/9/10/676
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