Photonic crystal L3 cavity laser fabricated using maskless digital photolithography
Projection photolithography using an extreme-ultraviolet light source is the core technology that has enabled patterning on the scale of a few nanometers that is required for modern electronic chips. However, this high-end system is neither affordable nor needed for photonics where critical feature...
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| Autors principals: | , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Wiley
2022-04-01
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| Col·lecció: | Nanophotonics |
| Matèries: | |
| Accés en línia: | https://doi.org/10.1515/nanoph-2022-0021 |
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