Photonic crystal L3 cavity laser fabricated using maskless digital photolithography
Projection photolithography using an extreme-ultraviolet light source is the core technology that has enabled patterning on the scale of a few nanometers that is required for modern electronic chips. However, this high-end system is neither affordable nor needed for photonics where critical feature...
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| Asıl Yazarlar: | , , |
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| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
Wiley
2022-04-01
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| Seri Bilgileri: | Nanophotonics |
| Konular: | |
| Online Erişim: | https://doi.org/10.1515/nanoph-2022-0021 |
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