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Fabrication of Substrate-Integrated Waveguide Using Micromachining of Photoetchable Glass Substrate for 5G Millimeter-Wave Applications

A millimeter-wave substrate-integrated waveguide (SIW) was firstly demonstrated using the micromachining of photoetchable glass (PEG) for 5G applications. A PEG substrate was used as a dielectric material of the SIW, and its photoetchable properties were used to fabricate through glass via (TGV) hol...

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Autors principals: Seung-Han Chung, Jae-Hyun Shin, Yong-Kweon Kim, Chang-Wook Baek
Format: Artigo
Idioma:Inglês
Publicat: MDPI AG 2023-01-01
Col·lecció:Micromachines
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Accés en línia:https://www.mdpi.com/2072-666X/14/2/288
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