Polymer-derived SiBCN ceramic pressure sensor with excellent sensing performance

Abstract Pressure measurement with excellent stability and long time durability is highly desired, especially at high temperature and harsh environments. A polymer-derived silicoboron carbonitride (SiBCN) ceramic pressure sensor with excellent stability, accuracy, and repeatability is designed based...

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Egile Nagusiak:	Gang Shao, Junpeng Jiang, Mingjie Jiang, Jie Su, Wen Liu, Hailong Wang, Hongliang Xu, Hongxia Lit, Rui Zhang
Formatua:	Artigo
Hizkuntza:	Inglês
Argitaratua:	Tsinghua University Press 2020-06-01
Saila:	Journal of Advanced Ceramics
Gaiak:	polymer-derived ceramics (PDCs) silicoboron carbonitride (SiBCN) ceramic pressure sensor piezoresistivity high temperature and harsh environment sensor
Sarrera elektronikoa:	http://link.springer.com/article/10.1007/s40145-020-0377-6
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