Polymer-derived SiBCN ceramic pressure sensor with excellent sensing performance

Abstract Pressure measurement with excellent stability and long time durability is highly desired, especially at high temperature and harsh environments. A polymer-derived silicoboron carbonitride (SiBCN) ceramic pressure sensor with excellent stability, accuracy, and repeatability is designed based...

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Bibliografski detalji

Glavni autori:	Gang Shao, Junpeng Jiang, Mingjie Jiang, Jie Su, Wen Liu, Hailong Wang, Hongliang Xu, Hongxia Lit, Rui Zhang
Format:	Artigo
Jezik:	Inglês
Izdano:	Tsinghua University Press 2020-06-01
Serija:	Journal of Advanced Ceramics
Teme:	polymer-derived ceramics (PDCs) silicoboron carbonitride (SiBCN) ceramic pressure sensor piezoresistivity high temperature and harsh environment sensor
Online pristup:	http://link.springer.com/article/10.1007/s40145-020-0377-6
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