Integrated Nanomanipulator With In-Process Lithography Inspection
Nanomanipulation techniques are extensively in use not only to reveal more characteristics of nano, micro and mesoscopic phenomena but also to build functional nano-devices that can bridge components between two or more scales to diversify the functions. In this paper, a novel integrated and numeric...
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| Hoofdauteur: | |
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| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
IEEE
2020-01-01
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| Reeks: | IEEE Access |
| Onderwerpen: | |
| Online toegang: | https://ieeexplore.ieee.org/document/9097243/ |
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